to the world of nanotechnology!
We have a clean room area of more than 120m² including an entire CMOS production line.
Chair for Micro- and Nanoelectronics
The Chair for Micro- and Nanoelectronics focuses on the fabrication and characterization of novel nanoscale and low-dimensional materials, in which functional properties can be exploited by suitable structuring, built-in defects or heterostructures. Thus, a variety of multiferroic, nanoionic or photonic phenomena can be specifically controlled by nanostructuring, interfacial effects and doping. For this purpose, a CMOS technology manufacturing line is available to exploit the specific features of different fabrication methods in semiconductor and micro/nanotechnology. Fundamental physical, electronic, chemical or photonic properties are characterized and modeled on a nearly atomic scale. Based on these material properties, innovative devices and circuit concepts are developed and analyzed for applications in information technology, sensor technology, photonics and quantum technologies.
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