to the world of nanotechnology!
We have a clean room area of more than 120m² including an entire CMOS production line.
Chair for Micro- and Nanoelectronics
The Chair for Micro- and Nanoelectronics focuses on the fabrication and characterization of novel nanoscale, functional, and low-dimensional materials. By means of patterning, controlled defect engineering, and the use of heterostructures, material properties are tailored and made accessible for various applications. A wide range of phenomena, such as multiferroic, superconducting, nanoionic, and photonic effects, can be precisely controlled via nanostructuring, interface engineering, and doping. The chair operates a modern CMOS technology line, enabling the optimal use of various fabrication processes from semiconductor as well as micro- and nanotechnology. The fundamental physical, electronic, chemical, and photonic properties of these materials are investigated and modeled down to nearly atomic scales. Based on these findings, we develop and analyze innovative materials, devices, and circuit concepts for applications in information technology, sensing, photonics, and quantum technologies. We are a partner in the Research Laboratories Microelectronics Germany (ForLab) network.
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