Finished Projects
A highly qualified and experienced team of researchers at the Chair of Intelligent Microsystems is developing new high-performance processes for system integration.
In further stages of development of the pressure sensor, it is intended to transfer production to a back-end process.
Instead of UV radiation, photoelectrons are used for ionisation.
Development of a monolithically integrated, nanoscale sensor system.
The use of modern drift detectors manufactured using planar technology on a semiconductor basis forms the basis for high-performance systems.
An innovative concept for improving nanoelectronic switches is the tunnel FET ...
A highly qualified and experienced research team at the Intelligent Microsystems Institute focuses on the development and standardisation of new system integration processes.
New types of channel materials are set to replace existing solutions and revolutionise field-effect transistors.



